MSA-500 Micro System Analyzer - Techn. Data

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Configurations

Model

Measurement of

Out-of-Plane Vibration

In-Plane
Motion

Topography

Single
Beam

Differential

24 MHz

MSA-500-M2

x

 

 

 

 

MSA-500-M2-D

x

x

 

 

 

MSA-500-M2-20

x

 

x

 

 

MSA-500-M2-20-D

x

x

x

 

 

MSA-500-P

 

 

 

x

 

MSA-500-PM2

x

 

 

x

 

MSA-500-PM2-D

x

x

 

x

 

MSA-500-PM2-20

x

 

x

x

 

MSA-500-PM2-20-D

x

x

x

x

 

MSA-500-TM2

x

 

 

 

x

MSA-500-TM2-D

x

x

 

 

x

MSA-500-TM2-20

x

 

x

 

x

MSA-500-TM2-20-D

x

x

x

 

x

MSA-500-TP

 

 

 

x

x

MSA-500-TPM2

x

 

 

x

x

MSA-500-TPM2-D

x

x

 

x

x

MSA-500-TPM2-20

x

 

x

x

x

MSA-500-TPM2-20-D

x

x

x

x

x



  
General Specifications

Compliance with Standards

Electrical safety

IEC/EN 61010

EMC

IEC/EN 61326;

Emission: FCC Class A, IEC/EN 61000-3-2 and 61000-3-3

Immunity: IEC/EN 61000-4-2 to 61000-4-6 and IEC/EN 61000-4-11

Laser safety

IEC/EN 60825-1 (CFR 1040.10, CFR 1040.11)

Housing and Power

Component1)

MSA-I-500
Sensor Head

MSA-E-500
Junction Box

MSA-W-500 Data
Management System

Power

via MSA-E-401 Junction Box

100 VAC … 240 VAC ±10 %, 50/60 Hz; max. 60 W

100 VAC … 240 VAC ±10 %, 50/60 Hz; max. 350 W

Dimensions

[W x L x H]

see figure

450 mm × 355 mm × 135 mm

(17.7 in x 14.0 in x 5.3 in)

450 mm x 550 mm x 190 mm

(17.7 in x 21.7 in x 7.5 in)

Weight

10.4 kg (22.9 lbs)

~8 kg (~17.6 lbs)

~ 18 kg (~39.7 lbs)

Operating temperature

+5 °C … +40 °C (41 °F … 104 °F)

Storage temperature

-10 °C … +65 °C (14 °F … 149 °F)

Relative humidity

Max. 80%, non-condensing

1) OFV-5000 Vibrometer Controller and OFV-551/552 Fiber-Optic Interferometers are also needed for out-of-plane measurements

 



  
System Components & Accessories

 

MSA-O-500 Optical Units

MSA-O-500-P

MSA-O-500-TP1

Measurement Microscope Head with video stroboscope system for in-plane motion analysis

MSA-O-500-S

MSA-O-500-TS1)

Measurement Microscope Head with one pair of scanning mirrors for scanning vibrometer measurements and video stroboscope system for in-plane motion analysis

OFV-551 Fiber-Optic Interferometer (see separate data sheet)

MSA-O-500-D

MSA-O-500-TD1)

Measurement Microscope Head with video stroboscope system for in-plane motion analysis and two pairs of scanning mirrors: One for scanning vibrometer measurements and one for the stationary reference beam. The reference beam is positioned using 2 controls on the front panel.

OFV-552 Dual-Fiber Interferometer with reference mirror (see separate data sheet)

All versions include a turret equipped with a long range lens with 10X magnification.

1) For topography measurements, equipped with an additional piezo-objective positioning stage and interference objective

 

Optics

Camera

Progressive scan camera, 1.4 Mpixel (1392 x 1040), IEEE 1394 FireWire interface

Light source

LED, 525 nm, coherence length ~8 µm

Laser safety class1)

Class 2 (< 1 mW visible output)

Beam diameter1) (FWHM)

~0.9 µm (with 50X microscope lens)

Scanner1)

Regulated double piezo scanner, resolution: 512 x 512 points within field of view

Piezo2)

Piezo-objective translation stage; travel range: max. 250 µm

Objectives for Vibration Measurements 3)

 

Magnification

Working distance (mm)

Field of view (µm x µm)

Optical resolution (µm)

A-MOB-010X

10X

30.5

  900 x  670

1.6

Optional objectives

A-MOB-002X

  2X

34.0

4500 x 3350

8.5

A-MOB-005X

  5X

37.5

1800 x 1340

3.6

A-MOB-020X

20X

20.0

  450 x   335

 1.2

A-MOB-050X 

50X

17.0

  180 x   134

0.85

A-MOB-03x6

3.6x

53.0

 2500 x 1861

1.792

1) Only systems including scanning vibrometer

2) Only systems including topography measurement

3) Only systems including scanning vibrometer and/or in-plane motion measurement

 

Objectives for Topography Measurements 2)

Objectives
 Zoom factor
x-factor 		Numeric aperture NA Field-of-view
mm x mm 		Stand-off
distance mm 		Pixel resolution
µm
Mirau (Nikon CF Plan) interference objective   10
 0.30

0.90 x 0.67

7.40

0.65

Optional Michelson objectives (Nikon CF Plan) 2.5 0.075 3.59 x 2.68 10.30 2.58
5 0.13 1.80 x 1.34 9.30 1.29
Optional Mirau objectives 20 0.40 0.449 x 0.335 4.70 0.323
50 0.55 0.180 x 0.134 3.70 0.129
Michelson objective
(Polytec Achro MI LD) 		4
 0.1
 2.24 x 1.68
 >30
 1.61


OFV-5000 Vibrometer Controller

Version

Standard Configurations
MSA-500-…-M2 (1.5 MHz)

High Frequency Configurations MSA-500-…-M2-20

HF Velocity

HF Displacement

Decoder configuration (please see decoder data sheets for details)

VD-02: Wide-bandwidth
velocity decoder

VD-06: High precision digital velocity decoder

VD-02: Wide-bandwidth
velocity decoder

VD-05: 10 MHz velocity  decoder

VD-02: Wide-bandwidth
 velocity decoder

DD-300: 24 MHz displacement  decoder

For performance and resolution see Performance Specifications section

 

MSA-E-401 Junction Box

Functions

- Connects Vibrometer Controller and Data Management System

- Provides piezo driver for scanner, amplifier for excitation signals and current-source output for Piezo Focus control

- Includes microscope strobe controller for generating the LED strobe signal and synchronization with the excitation signal of the structure

Digital interfaces

RS-232, USB and Focus Control

Input signals

±200 mV ... ±10 V analog inputs for vibrometer and reference signal,
TTL inputs for trigger and gate1)

Output signals

Analog voltage outputs for specimen excitation, TTL outputs SYNC and AUX
(output for special applications, programmable)

Excitation booster

Built-in amplifier, differential output, 10 V / 50 mA peak amplitude

1) not available for 20 MHz version

 

MSA-W-400 Data Management System

Computer

Industrial PC, min. AMD Athlon™ XP3000+, 2,6 GHz, 1 GB RAM, 120 GB HDD

Data backup/storage

Combined DVD (8X) and CD (32x) recorder and storage

Live video board

High end graphics board with VIVO

ADC / generator boards

See separate section below

IEEE 1394 FireWire adapter

For acquisition of the video signal from the progressive scan camera

Data link

Ethernet LAN

Operating system

Microsoft Windows® XP (Windows® 2000 on request)

Hardware for Out-of-Plane Data Acquisition

Version

Standard Configurations
MSA-500-…-M2

High Frequency Configurations
MSA-500-…-M2-20

Input channels

2 (4, with PSV-S-VDD option)

2

Resolution

effective 12...16 bit (depending on bandwidth)

12 bit

Input voltage range

±200 mV ... ±10 V

±200 mV ... ±10 V

Trigger

External or analog, pre‑ and post‑trigger

External or analog, pre‑ and post‑trigger

Gate

Additional input for gated measurements

 -

FFT frequency range

DC ... 1 MHz; DC ... 2 MHz (optional) 

DC … 40 MHz

Specimen excitation

Internal signal generator, up to 40 MHz, output voltage max. ±10 V with adjustable offset

Hardware for In-Plane Data Acquisition

Camera

Progressive scan camera, 1.4 Mpixel (1392 x 1040), IEEE 1394 FireWire interface

Strobe generation

Pattern generator board for producing strobe pulses for the object illumination

Specimen excitation

Internal signal generator, up to 2 MHz, output voltage max. ±10 V  with adjustable offset

 

Optional Accessories

A-STD-BAS Base Stand

Base Stand for installation on optical tables.

Dimensions: 342 mm x 430 mm x 350 mm
(13.5 in x 16.9 in x 13.8 in)

Weight: ~ 8 kg (~17.6 lbs)

A-STD-BBO
Standard Stand

Standard Stand with passive air vibration damping. Available with metric or inch hole-patterns.

Dimensions: 500 mm x 750 mm x 590 mm
(19.7in x 29.5 in x 23.2 in)

Weight: ~ 70 kg (~154 lbs)

A-STD-TAB 
Workstation

The workstation includes the stand, monitor arm, BNC connectors and active air vibration damping. Available with metric or inch hole-patterns.

Dimensions: 900 mm x 900 mm x 1325 mm
(35.4 in x 35.4 in x 52.2 in);
desk top height 910 mm (35.8 in)

Weight: ~ 175 kg (~386 lbs)

Compressed air supply: 6.5 bar … 12 bar; flow rate: max. 1120 l/min

A-CAB-BAS
System Cabinet

A-CAB-EXT
System Cabinet
Extension

 

19’’ housing for the Data Management System, Vibrometer Controller and Junction Box. Slides under the Workstation.

Dimensions: 555 mm x 630 mm x 555 mm
(21.9 in x 24.8 in x 21.9 in)

Weight: ~ 65 kg (~143 lbs)

Extension (right): convenient stand alone solution. Provides additional workspace for equipment separated from the optical table.

 

 

 



  
Performance Specifications

Out-of-Plane Measurements

Version

Standard Configurations
MSA-500-…-M2

HF Configurations
MSA-500-…-M2-20

Standard

with PSV-S-VDD1)

HF Velocity

HF Displacement

Max. vibration frequency

1.5 MHz (2 MHz)2)

2 MHz

10 MHz

24 MHz

Max. displacement

 -

arbitrary

-

± 75 nm

Displacement resolution

 -

< 0.4 pm/ÖHz

-

<0.1 pm/ÖHz 3)

Max. vibration peak velocity

± 10 m/s

Velocity resolution (rms)4)

< 1 µm/s

1) with PSV-S-VDD digital demodulation (optional)

2) with PSV-S-BW2M bandwidth extension (optional)

3) At 100% reflectivity

4) The resolution limits of the OFV-5000 Vibrometer Controller are changed in conjunction with the vibrometer scanner. The resolution is defined as the root mean square of the signal amplitude (rms) at which the signal-to-noise ratio is 0dB in a 10 Hz spectral bandwidth (RBW), measured on 3M Scotchlite Tape™ (reflective film).

 

In-Plane Measurements

Vibration frequency range

0.001 Hz …1 MHz

Maximum velocity

> 0.1 m/s … 10 m/s (magnification dependent)

In-plane amplitude and resolution performance:

Microscope magnification

   5X       

10X

20X 

40X      

50X      

100X

Max. peak-to-peak motion
amplitude @ 2 kHz

1795 µm

897 µm

448 µm

224 µm

179 µm

89 µm

Displacement resolution1)

1 nm

Time resolution

100 ns (strobe exposure time); max. strobe jitter ±40 ns

Precision of phase

0.16 mrad (0.009°) @ 1 kHz;  0.016 rad (0.9°) @ 100 kHz;
0.16 rad (9°) @ 1 MHz

System output

Displacement data, Bode diagram, step-response plots,
ring-down plots, trajectory plots

1)  Frequency noise floor for 512 shots per frequency (15 nm rms) on a vibration isolated table

 

Topography Measurements 
Sampling increment 10 nm 87 nm
Evaluation procedure1) Smooth surface Rough surface Smooth surface Rough surface
Resolution (RMS)2) 35 pm 350 pm 45 pm 1.2 nm
Resolutionsingle (RMS) 195 pm 3.65 nm 300 pm 14 nm
Repeatability3) 250 pm 2.5 nm 500 pm 20 nm
Average flatness deviation4)  550 pm 7.5 nm 2 nm 50 nm
Measurement performance on a traceable calibrated standard  (PTB Type A1 (ISO 5436-1)
Repeatability5) 0.07 %
Expanded uncertainty of measurement6) 0.50 %
Measurement time Measurement time = (Z range + 6 μm)/(sampling increment x frame rate)
- Examples7) ~1.2 min (10 nm sampling increment) ~8 s (130 nm sampling increment)

1) "Smooth surface": Evaluation of the correlogram phase. "Rough surface": Evaluation of the correlogram envelope
2) Roots mean square (RMS) of the signal amplitude at an averaging number of 50 measurements on a silver coated, parallel aligned plane mirror, measured under vibration-damped, temperature controlled conditions. Values for Resolutionsingle correspond to single measurements
3) Standard deviation of the measured flatness in a series of 100 measurements on a parallel plate (l/20) slightly tilted
4) Mean value of the flatness (according to ISO 1101), see 3)
5) RMS deviation of 30 step height measurements, referred to a calibrated step height of nominal 50 μm
6) 3x combined standard uncertainty + deviation of the nominal value at 30 consecutive measurements under repeating conditions. The combined standard uncertainty is the quadratic mean out of the uncertainty of the normal and the standard deviation of the measurement values.
7) Conditions: Z range 15 μm, frame rate 30/s, without averaging

 



  
Software Features

 

Out-of-Plane Measurements

Data Acquisition

Video display

Live, full‑field, black & white video image of test object directly incorporated into user interface for interactive scan set‑up and beam positioning. Digital zoom into live video image

Laser positioning

Visible laser moves with cursor on live video image by clicking or dragging the mouse

Defining scan geometry
  • APS Professional mode for up to 512 x 512 points per object, of any shape. Measurement points are defined graphically over the live video image using a mouse. User can draw individual objects using polar, Cartesian or hexagonal grids, or define single points. Any object may be moved or stretched while grouped or ungrouped with other objects.
     
  • Alternatively, the measurement grid can be imported from CAD or FE packages or previous vibrometer measurements.
     
  • Optional MSAGEO Geometrie Scan for direct geometry scan data acquisition for the vibration measurement

Vibrometer control

All vibrometer parameters such as velocity range and tracking filter are software controlled via RS-232 interface.

Display

Simultaneous display of live video showing actual laser spot, entire scan area including scan points, and multiple analyzer displays of various signals (time traces and spectra)

Specimen excitation

Wide range of waveforms including sine, periodic chirp, white noise, random signals, sweep and arbitrary signals

Acquired scan data

Entire spectrum acquired for all channels at all scan points

FastScan

Fast acquisition mode (up to 50 points/s) for measurements at a single frequency. Bandwidth is definable

Time domain data (optional)

Time domain acquisition, time domain averaging, time domain animation

Gate input

Gate input for intermittent scan control

Scan data validity check

Data quality check at all scanned points in Signal Enhancement (SE) mode. MSA-400 checks the quality of data in each spectrum. The averaged spectrum is weighted toward those spectra with the best signal to noise ratio. Measured points are labeled: optimal (SE only), valid, or A/D overload

Trigger

Auto or manual threshold, rising or falling edge, source: external or any measurement signal

Averaging

Complex or magnitude averaging of spectra, peak hold, time

Overlap FFT

Up to 75% for reduced averaging time

FFT lines

6,400 standard; 12,800 optional; Zoom FFT optional

Window functions

Rectangular, Hamming, Hanning, Flat top, Blackman Harris, Bartlett, Exponential

Data Processing and Analysis

Display

Color/gray, filled/unfilled contours and 3-D relief maps over stored video image (static or animated), averaged spectra over all scan points, individual spectra at each point as Bode  or Nyquist plots, line profiles. Animation of video image for easy visualization of results.

Data are scaled in velocity, acceleration or displacement. Logarithmic/linear axes

Data transfer

ASCII , Universal File Format, ME’scope binary data interface (optional)

Graphics transfer

More than 20 different graphic formats (AVI, JPEG, BMP, TIFF...)

Data processing

Complex spectral analysis provides the following quantities and functions for area and/or single-point data: magnitude, magnitude dB(A), phase, real, imaginary, frequency response function (FRF), H1, H2, auto‑power, cross‑power, coherence, averaged RMS over frequency. 3rd octave analysis

Polytec Signal Processor

Integrated tool for signal processing in Presentation Mode with MS Excel-like usability

Automated processing

Software can be fully automated via Visual Basic® compatible scripting

 

 

In-Plane Measurements

Data Acquisition

Working principle

In the Acquisition Mode, video sequences are sampled and analyzed using proprietary measurement algorithms.

Strobe illumination control

Control of the strobe pulses (interval, pulse length)

Data acquisition

Acquisition of the stroboscopic video image via FireWire interface and live view of object movement

Specimen excitation

Integrated signal generator software for specimen excitation with sine and pulse signals with excitation frequencies up to 1 MHz

Data Processing and Analysis

Working principle

Motion analysis is performed interactively. Motion data based on pixel deviations are extracted and displayed as X, Y displacement values. Sub-pixel resolution enables motion measurements better than 10 nm

Live video display

The live video mode provides a steady, slow-motion image sequence of the test object’s motion for visual characterization.

Display
  • Displacements for individual frequencies and their differentiations as well as frequency spectrums
  • Bode plots for both – horizontal and vertical – motion can be viewed in a variety of different ways
  • All graphs can be examined using cursors, zoomed and panned. For each graph, different line and marker styles are selectable.

Data transfer

Graphs can be exported as image or ASCII file and sequences of images can be saved as AVI files.

 

Topography  Measurements

Data Acquisition

Working principle

By shifting an interference objective with respect to the sample, a high resolution X-Y-Z mapping is generated. The interference pattern is captured with the video camera.

Measurement modes

- Short coherent measurement, measurement with envelope or with phase shift (optional)

- Overlay technique for extended contrast range; individual Visual Basic® macros

Data acquisition

Acquisition of the video image via FireWire interface

Data Processing and Analysis

Post processing

Envelope or phase evaluation

Data evaluation

Linear regression; polynomial fit; subtracting; averaging; filters like median, erosion, high pass and low pass filter; masking functions

Data display

- Surface view: 2-D, 3-D presentation and isolines view, with video overlay

- Profile view: profile sections; correlogram; roughness/waviness parameters; graphs/diagrams, parallelism, geometrical data like angle, heights, radius etc.

Data transfer

Graphs can be exported in various common image graphic formats; measurement data can be exported as ASCII file.

Automated processing

Software can be fully automated via Visual Basic® compatible scripting.

Windows® and Visual Basic®  are registered trademarks of Microsoft Corp.