Microscope Systems

Inspired by the growing variety of Micro-Electro-Mechanical-Systems (MEMS), Polytec presents a new line of microscope systems for measurements of MEMS dynamics and topography.

The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures.

Using standard microscope optics, Polytec's microscope-based systems for measurement of out-of-plane and in-plane vibrations can easily be integrated into existing systems.

For wafer-level testing, all systems can easily be mounted onto manual or fully automated probe stations.

  

 
 Copyright 2007 Polytec GmbH. Technical specifications are subject to change.
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MSA-500 Micro System Analyzer

The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures.   

  • Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry

  • Measure in-plane motion and vibration by Stroboscopic Video Microscopy

  • Determine surface topography by White Light Interferometry

  • Test wafers and individual die by combining Polytec’s MSA-500 with a MEMS probe station

 Features | Techn. Data | Applications | Download |
MSA-400 Micro System Analyzer
MSA-500 Micro System Analyzer

MSV-400 Microscope Scanning Vibrometer

The MSV-400 features full-field characterization of out of-plane motion of any kind of microstructures.

  • Large 24 MHz bandwidth and small laser spot size of ³ 1 µm

  • Fast-Scan mode allows data-acquisition at a rate of 100 measurements per second and with picometer resolution

  • Can be integrated in a MEMS probe station for wafer-level testing


 Features | Technical Data | Applications | Datasheet |
MSV-400 Microscope Scanning Vibrometer

MSV-050/100 Microscope Adapter

The bridge that connects Laser Doppler Vibrometry (LDV) to the micro world of MEMS, designed to couple a fiber-optic vibrometer head to a microscope.

  • precise single-point and differential vibration analysis on microscopic structures

  • Optional, video-enabled steering of the laser beam with high spatial resolution

  • Modular design easily upgrades to the MSV-400 Microscope Scanning Vibrometer


 Features | Technical Data | Accessories | Datasheet |
MSV-050/100 Microscope Adapter

PSV Software

Polytec's software package dedicated to the acquisition and processing of out-of-plane vibration measurements using PSV-400, MSV-400 and MSA-400 systems. PSV Software is a powerful tool that
 
  • Controls the scanners
  • Performs data processing
  • Provides intuitive & animated data visualization
  • Provides interfaces to modal,
    FEM and other software

 General | Rel. 8.5 | Rel. 8.4 | Rel. 8.3 | Updates |
PSV Software Screen

PMA Software

Comprehensive software for in-plane analysis of stroboscopic video microscopy data when using the MSA-400 Micro System Analyzer or PMA-400 Planar Motion Analyzer. PMA Software features:

  • Control and analysis software
  • Sub-pixel image processing
  • Live slow motion video
  • Bode-plot, step response and ring down
  • Powerful analyzers and export filters

 General | PMA 2.5 | PMA 2.4 | Updates |
PMA Software Screen

TMS Software

Easy to handle data acquisition and analysis software for Polytec's Topography Measurement Systems as wll as the MSA-400 with Topography Option. The software package includes all the necessary commands for instrument operation, data acquisition, analysis and presentation. Outstanding 2-D and 3-D data representation can be enhanced with profile cuts and filter algorithms.
 Updates | Features |
TMS Software Screenshot