On-line, 17.04.2008 - 17.04.2008Time: 11:00 PT
Learn about Polytec´s Micro System Analyzer (MSA-500) for MEMS Characterization. Our Laser Doppler Vibrometry (LDV) is a widely accepted tool for dynamic response measurement onmicro-structures.
The MSA system uses automated scan capability to measure and display out-of-plane deflection shapes with amplitudes down to the pictometer level and frequencies to 24 MHz.
By adding stroboscopic video microscopy and scanning white light interferometer, our combined capabilities enable 3D motion analysis and static topography measurement.
We present several characterization measurements to exemplify use of this technology.
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