Inspired by the need to characterize the dynamics of the growing variety of micro-electromechanical systems (MEMS), Polytec has developed an innovative line of microscope-based systems to measure the dynamics and topography of microsystems and MEMS devices. The MSA-500 Micro System Analyzer is the premier measurement tool for the analysis and visualization of structural vibrations and surface topography in microstructures. For wafer-level testing, most systems can easily be mounted onto manual or automated probe stations.

• MSA-500 Micro System Analyzer
• MSA-050-3D Micro System Analyzer
• UHF-120 Ultra-High Frequency Vibrometer
• TopMap µ.Lab